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filingDate 1980-03-24^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39be4af56034e0217fae17188218ce9d
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publicationDate 1981-04-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4263065-A
titleOfInvention Semi-open liquid phase epitaxial growth system
abstract A semi-open method for growing an epitaxial layer on a substrate by increasing the pressure, refluxing the volatile components, contacting the substrate with the melt solution, and reducing the solution temperature.
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