| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b94d2715cda37c1f23e48f9f4f23422 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26546 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
1980-02-29^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1981-05-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70cacd66229e539f9fa9a5f0f6dae45f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a05dd4b89e7c294084f17b76f7b50ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f740770d7b271f67f88a342429eec003 |
| publicationDate |
1981-05-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4267014-A |
| titleOfInvention |
Semiconductor encapsulant for annealing ion-implanted GaAs |
| abstract |
A method for protecting an ion-implanted substrate during the annealing process by covering the ion-implanted layer with a suitable encapsulant. A thin layer of ions are implanted into a GaAs substrate. A protective layer of germanium, amorphous GaAs, doped GaAs, or GaAlAs is applied over the implanted layer and on the periphery of the ion-implanted GaAs substrate. The composite is annealed at a temperature which is adequate for the lattice to recover from the ion-implantation-induced damage. The protective layer is removed subsequent to the anneal step, without any damage to the ion-implanted layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8201619-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4952446-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4946735-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5744375-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4494997-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5659188-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4437139-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5037674-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4615766-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4344980-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5590017-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5391515-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0193021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5162242-A |
| priorityDate |
1980-02-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |