| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3aa99e92b4b3cb687c7b2c1ff89bebf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-123 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate |
1985-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5689d7d4759d20401c764dc34ba34e6 |
| publicationDate |
1986-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4629859-A |
| titleOfInvention |
Enhanced evaporation from a laser-heated target |
| abstract |
The rate of evaporation of material from a laser-heated target is enhanced by coating the target with a layer of condensed substantially inert gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6758920-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2253413-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858102-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6849139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010301013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9632220-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4892751-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007039817-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5547716-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008165405-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7474448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006245084-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008053972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6660343-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5668019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6494217-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9426425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4125801-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010181706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002112791-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5593742-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6645427-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6442974-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5637245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6331234-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7339750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7816623-B2 |
| priorityDate |
1985-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |