| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6dacaa0ceae8e4330441f7bb1f70cb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-256 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N69-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-18 |
| filingDate |
1987-07-30^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-04-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c80bdfa33f207ee0a5ef7b42b8e51769 |
| publicationDate |
1989-04-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4822673-A |
| titleOfInvention |
Microwave device |
| abstract |
A microwave device comprises a substrate and fine metal particles having diameters of 0.1 μm or smaller and arranged in a regular pattern on the substrate. In the preferred embodiment of the present invention, the substrate is subjected to electron beam irradiation in a stripe pattern and then a metal or alloy is deposited onto the irradiated area, thereby forming a regular arrangement of fine metal particle deposits which has not been successfully achieved by any prior art technique. The thus obtained device has a greatly improved high-frequency characteristics. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5085931-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5238975-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6366012-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004023055-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6891322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5275880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6558448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5189078-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5331162-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852425-B2 |
| priorityDate |
1984-10-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |