patent/US-4983254-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4983254-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
filingDate	1990-01-04^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1991-01-08^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c725b8a43394a1f143545e5e524496b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f12a8ea14f6f8b684b4e4ea63b4c0153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37908865e9bd94b409947fffc4af9ef2
publicationDate	1991-01-08^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-4983254-A
titleOfInvention	Processing for stripping organic material
abstract	A process for stripping an organic material, which comprises forming gases including a gas containing oxygen and a gas containing a halogen into plasma in a plasma chamber, and supplying an active species of the halogen in the gas formed plasma to a reaction chamber to strip the organic material in the reaction chamber, wherein one mole or more of water vapor based upon two moles of the halogen molecule is fed to the reaction chamber, and the active species of the halogen are removed before contact thereof with the organic material.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007123049-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4202158-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6958294-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5671116-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5614026-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5575883-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9406571-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5812361-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008296258-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5529636-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005109733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410417-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6440864-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9400251-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003207563-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6015761-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5226056-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5228052-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6692903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5880922-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6171662-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6062237-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018254190-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6599829-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6440874-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003203642-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5998104-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005022839-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6387819-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5356478-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217452-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5925577-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6080680-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5750208-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007186953-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6610168-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4132559-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8361240-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5773201-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770100-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5868849-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007193602-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6352936-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5763326-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7001848-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5792314-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6007671-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5961775-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5835333-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6024045-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008078425-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5919336-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006016395-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5753567-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6242350-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5693147-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329298-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6805139-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5445679-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5733821-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5562775-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004099284-A1
priorityDate	1989-01-10^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014

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