| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be3ada8cd028023aea78daa3709ad456 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24942 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-04 |
| filingDate |
1992-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-11-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94bb54bce2a9109bac70208383e50ead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fc9ea88e4a39259e606f2d0c3b03f2f |
| publicationDate |
1993-11-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5260107-A |
| titleOfInvention |
Plasma chemical vapor deposition process for producing a hard multilayer coated product |
| abstract |
This present invention provides a hard multilayer coated product comprising a hard wear-resistant titanium compound coating layer, a titanium compound layer having a compositional gradient and a self-lubricating coating layer comprising hard amorphous carbon as the principal component successively formed on the surface of a substrate, the first layer being formed at about 500° C. by the plasma CVD method in a vacuum followed by the formation of the second and third layers at 250° to 400° C. in a vacuum maintained at the same level as above. The hard multilayer coated product is improved in wear-resistance and self-lubricity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0796930-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6231956-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005098119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5462775-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6340637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006134912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005106218-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002102361-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6348237-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007254187-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19614557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5707748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7887919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011045309-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5976639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6203898-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6977225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005003098-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7942111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5930077-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5663000-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6057031-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5645900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004097073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5466305-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7189436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7268078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6653234-B2 |
| priorityDate |
1991-04-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |