patent/US-5264696-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5264696-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_875ecb1d71f9569767de393adb6bc821
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-874
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-10
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-10
filingDate	1992-04-23^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1993-11-23^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6c291007cabf89542e0c4572e86861b
publicationDate	1993-11-23^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5264696-A
titleOfInvention	Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios
abstract	A cantilever chip for scanning probe microscope includes a cantilever portion, a probe portion formed at a free end of the cantilever portion, a mirror portion formed on the cantilever portion on a side opposite to a side where the probe portion is formed, and a support portion for supporting the proximal end of the cantilever portion. A step is formed between the cantilever portion and the support portion, so that the support portion is set back from the surface of the cantilever portion on the side where the probe portion is formed.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008223823-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8893310-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062535-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5367165-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5386110-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8485418-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6694805-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8427183-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012090058-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8695111-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003197123-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5877412-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6415653-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7948252-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398867-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0106516-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8373428-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6358426-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737709-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012036602-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5920067-A
priorityDate	1991-05-20^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE33387-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4016472-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0413042-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5051379-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5193385-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0413041-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5021364-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136083475 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57180004

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