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filingDate 1993-08-25^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1994-11-15^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d13112ae150a87584e39e78f37a9b35b
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publicationDate 1994-11-15^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5365054-A
titleOfInvention Optical detector having a plurality of matrix layers with cobalt disilicide particles embedded therein
abstract Silicon and metal are coevaporated onto a silicon substrate in a molecular beam epitaxy system with a larger than stoichiometric amount of silicon so as to epitaxially grow particles of metal silicide embedded in a matrix of single crystal epitaxially grown silicon. The particles interact with incident photons by resonant optical absorption at the surface plasmon resonance frequency. Controlling the substrate temperature and deposition rate and time allows the aspect ratio of the particles to be tailored to desired wavelength photons and polarizations. The plasmon energy may decay as excited charge carriers or phonons, either of which can be monitored to indicate the amount of incident radiation at the selected frequency and polarization.
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priorityDate 1992-07-10^^<http://www.w3.org/2001/XMLSchema#date>
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