| abstract |
A modular jet spray device for use in cleaning submicron sized particles and molecular films using CO 2 spray. The modular jet spray device comprises a valve body having first and second ends and an gas input for receiving a CO 2 cleaning agent. A jet spray nozzle is removably secured to the first end of the valve body and comprises an input orifice and an output orifice. A sleeve assembly is removably secured to the second end of the valve body, and a needle assembly is removably secured to the sleeve assembly. The needle assembly has a needle that inserts into the input orifice of the nozzle. A micrometer is removably secured-to the sleeve assembly distal from the valve body and is coupled to the needle assembly for adjusting the position of the needle relative to the inlet orifice of the jet spray nozzle. A CO 2 gas source is coupled to the gas input of the valve body. Optionally, a filter may be coupled between the CO 2 gas source and the gas input of the valve body. The modular jet spray device has a one piece nozzle and orifice that eliminates gaps that cause spitting, clogging, or ice crystal formation. The modular jet spray device provides for a much finer adjustment of spray parameters and is assembled from simple components in modular form. The modular design provides for a rapid matching of output orifice, nozzle, and needle combinations for optimized cleaning of submicron sized particles and molecular films. |