abstract |
The micromachine includes a movable portion, an unmovable portion surrounding the movable portion, a connecting portion for connecting the movable portion with the unmovable portion in a cantilever fashion, and a support member for connecting the movable portion with the unmovable portion at a location other than a location at which the movable portion is connected with the unmovable portion through the connecting portion. The support member is formed of weaker material than material of which all of the portions are formed, with respect to any one of properties which all of the portions have. Thus, only the support member can be cut off by applying energy effective to the one of properties thereto after the micromachine has been packaged. |