http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5626779-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0828
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-02
filingDate 1994-05-31^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-05-06^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a1e5f3aa251bd823741b5181d8261b5
publicationDate 1997-05-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5626779-A
titleOfInvention Micromachine transducer with cantilevered movable portion
abstract The micromachine includes a movable portion, an unmovable portion surrounding the movable portion, a connecting portion for connecting the movable portion with the unmovable portion in a cantilever fashion, and a support member for connecting the movable portion with the unmovable portion at a location other than a location at which the movable portion is connected with the unmovable portion through the connecting portion. The support member is formed of weaker material than material of which all of the portions are formed, with respect to any one of properties which all of the portions have. Thus, only the support member can be cut off by applying energy effective to the one of properties thereto after the micromachine has been packaged.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6650102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004077091-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7051581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004155668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6769292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6664067-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6679130-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5895853-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005011260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6087638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002029621-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6091050-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003055587-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6690179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6857309-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6837115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6772642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6860148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6936471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003203500-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004265914-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7112443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6951144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004123650-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6458698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005103097-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6393898-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6732574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003141613-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003041676-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7013709-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6746615-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6736017-B2
priorityDate 1993-06-07^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4670092-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5186053-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4922756-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4974596-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128868700

Showing number of triples: 1 to 61 of 61.