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filingDate 1995-08-31^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1997-05-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5627815-A
titleOfInvention Precision machining method precision machining apparatus and data storage apparatus using the same
abstract A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.
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