| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c78d80e9d323ad7c79518c80e0b8d16 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-954
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1996-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d96e87b7d526a800cbdec1fcbc301adf |
| publicationDate |
1997-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5661071-A |
| titleOfInvention |
Method of making an antifuse cell with tungsten silicide electrode |
| abstract |
An improved antifuse design has been achieved by using a structure including a region of heavily doped N type silicon coated with a layer of ONO (oxide-nitride-oxide). Top contact to the ONO is made through a layer of tungsten silicide sandwiched between two layers of N type polysilicon. A cost effective method for manufacturing said antifuse structure is described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010308407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103151332-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6388305-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103151332-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6713839-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6812122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6399466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5923075-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6103555-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6307248-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006263946-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5789764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7795094-B2 |
| priorityDate |
1996-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |