http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5920791-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57341227c065dbddd1d3cf801bbaa86a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1997-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e228e8dbbd794c8927fe182f30ddb55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4072f72af23a8ee217a48edd4eb8a19 |
| publicationDate | 1999-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5920791-A |
| titleOfInvention | Method of manufacturing intermetal dielectrics for sub-half-micron semiconductor devices |
| abstract | A method of gap filling in the intermetal dielectric layer is described. Semiconductor device structures are provided in and on a semiconductor substrate and covered with an insulating layer. A conducting layer is deposited overlying the insulating layer and patterned wherein a gap is formed between portions of the patterned conducting layer. In a deposition chamber, the following steps are repeated until the gap is completely filled: a) depositing an oxide layer over the patterned conducting layer wherein an oxide overhang is formed on either side of the gap, and b) etching away the oxide overhang. The second conducting layer may now be deposited and patterned completing the fabrication of the integrated circuit device. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004048480-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6153509-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012267340-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6908361-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005459-B2 |
| priorityDate | 1997-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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