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filingDate 1998-01-30^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-10-05^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58ef8e4a011cdcc4746fcc4eced2e6e0
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publicationDate 1999-10-05^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5962654-A
titleOfInvention Alkoxyalkoxides and use to form films
abstract Metal alkoxyalkoxides wherein the alkoxy portion has 3-6 carbon atoms and the alkoxide portion has 2-6 carbon atoms are provided and are useful in forming films on a substrate.
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