| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-447 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-447
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-14 |
| filingDate |
1998-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-10-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_218994dc98997c0f0a5e9dccf5d7a802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f815bce655de5808e638e361b66e36 |
| publicationDate |
1999-10-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5969818-A |
| titleOfInvention |
Beam folding optics system and method of use with application in ellipsometry and polarimetry |
| abstract |
Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8339603-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015355029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7301631-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8189193-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017518509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9442016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015187202-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7110097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004070760-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7738105-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921395-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180137758-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6943880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7230701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8467057-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10018815-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006066854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10338362-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6144439-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101756857-B1 |
| priorityDate |
1998-03-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |