| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-862 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q20-04 |
| filingDate |
1998-03-10^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-02-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_512b3845b7954675260f5abd586313fb |
| publicationDate |
2001-02-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6194711-B1 |
| titleOfInvention |
Scanning near-field optical microscope |
| abstract |
A scanning near-field optical microscope has an optical waveguide probe, a vibration device having a piezoelectric vibrating body and an AC voltage generator for vibrating the probe relative to a surface of a sample. A vibration detecting device has a quartz oscillator and a current/voltage amplifier circuit for detecting vibration of the probe. A resilient body biases the probe into pressure contact with the quartz oscillator. A coarse displacement device effects coarse displacement of the probe to bring the probe close to the surface of the sample. An optical detection device has lenses and a photodetector for detecting light from the sample. A sample-to-probe distance control device has a fine displacement adjustment device and a servo circuit for effecting fine displacement of the probe in the Z direction. A two-dimensional scanning device having a fine displacement device and a scanning circuit scan the probe in X and Y directions. A data processing device converts a measurement signal from the photodetector into a three-dimensional image. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9423693-B1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009007956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022246933-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7649665-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7754964-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008250665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007081242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008156474-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012025068-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7589880-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9606052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007240757-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116168996-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007137697-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116168996-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8776261-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008178924-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005249451-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10042263-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008202581-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006028585-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7784107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010031405-A1 |
| priorityDate |
1997-03-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |