| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-948 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1998-12-22^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43b704511d533b1c4bae9b6b289f4bec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3d1b4a49fd1a27539f0c1f1c6c63026 |
| publicationDate |
2001-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6211093-B1 |
| titleOfInvention |
Laser ablative removal of photoresist |
| abstract |
In one aspect, the invention provides a method of exposing a material from which photoresist cannot be substantially selectively removed utilizing photoresist. In still another aspect of the invention, laser ablation of photoresist is utilized. In one implementation, the invention comprises forming a first material over a substrate. Photoresist is deposited over the first material and an opening is formed within the photoresist over the first material. Etching is then conducted into the first material through the photoresist opening. After the etching, the photoresist is laser ablated from over the first material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7074708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6753899-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005186801-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7419902-B2 |
| priorityDate |
1997-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |