| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2569
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0379 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-04 |
| filingDate |
1999-10-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f422fb909c4aeb87856a22de53fdd52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78b82425107b4dd62def5661f21eae4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_725dea320cda9d790e8bafc2797c964c |
| publicationDate |
2001-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6260568-B1 |
| titleOfInvention |
Apparatus and method for supplying uninterrupted gas |
| abstract |
An apparatus and a method for supplying uninterrupted gas by using an automatic switching gas supply system are provided. In the apparatus, a main gas supply source and at least one back-up gas supply source are provided which are connected by a plurality of conduits to a process tool. The conduits further include pressure regulators such that a gas pressure from the main gas supply source is always regulated at about 0.5 Kg/cm 2 ˜1 Kg/cm 2 higher than a gas pressure from the back-up gas supply source. The apparatus operates by pneumatic means so that no electric power is required. The apparatus further operates automatically by switching from the main gas supply source to the back-up gas supply source when the pressure drop in the main gas supply source exceeds the pressure differential that is preset in the system, e.g., between about 0.5 Kg/cm 2 and about 1 Kg/cm 2 . Any other suitable range of pressure differential may also be used depending on the type of gases transported and the conduits used. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2492772-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10941904-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104344215-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629821-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013036243-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10024497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11519555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012174563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7032606-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7000629-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3220041-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101839396-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101839396-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8322357-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9632516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9664384-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2930407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011114194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10400955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10161060-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013019979-A1 |
| priorityDate |
1999-10-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |