| abstract |
A photosensitive composition comprising a polyimide precursor, a photosensitive material having a structure represented by the following formulawherein A1 is an atom belonging to Group VI of the periodic table, in the molecule thereof and/or a photosensitive material having a structure represented by the following formula:wherein A2 is O, S or N atom, in the molecule thereof is suitable for formation of a positive tone pattern excellent in heat resistance, and applicable to electronic devices. |