| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0317 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C7-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-12 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C3-04 |
| filingDate |
1999-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-12-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f48057d0996ec15a923fc9be7857e5c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf88fd6a0de8c8a48fd3f04d246e343f |
| publicationDate |
2001-12-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6331811-B2 |
| titleOfInvention |
Thin-film resistor, wiring substrate, and method for manufacturing the same |
| abstract |
A thin-film resistor that enables a pattern to be simply formed by means of wet etching, that has an excellent resistance temperature characteristic, and that can be easily manufactured, and a method for manufacturing this thin-film resistor, as well as a wiring substrate with this thin-film resistor formed therein. A thin resistor film according to this invention has a structure in which crystal grains deposit in the matrix of amorphous titanium nitride. The thin resistor film is formed on a substrate. The crystal grains includes at least one of crystal titanium nitride and crystal titanium. The thin resistor film can be manufactured using a simple process and can provide a wide range of resistance values with a small tolerance and a temperature coefficient of resistance close to zero. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7432126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8970242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7193500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004251117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011228190-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006087400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015123691-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004082098-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011175637-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014017906-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6833520-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9410987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11230499-B2 |
| priorityDate |
1998-06-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |