| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2217-492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13394 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1339 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-24 |
| filingDate |
2000-03-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc8709a87fcc6358400c36ba3a7ed9f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a662a0c2d995fe88962ff837f83199d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6595f64e20a71e90c7129054ba21887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cfcb9cebc234914d33bcbdd49a9bb7a |
| publicationDate |
2002-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6372292-B1 |
| titleOfInvention |
Insulating paste composition for rib formation and method of rib pattern formulation |
| abstract |
An insulating paste composition for rib formation which comprises an insulating material, an organic binder, a light-absorbing substance, and an organic solvent. A rib pattern is formed by sandblasting an insulating layer formed of the composition using a lithographically formed resin pattern mask. The composition forms an antireflective insulating layer which can provide a rib pattern excellent in crosssectional contour and dimensional precision. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002163108-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003059543-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6916222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2824420-A1 |
| priorityDate |
1999-03-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |