patent/US-6379466-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379466-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45572 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F28F3-12
classificationIPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F28F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
filingDate	1994-05-05^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2002-04-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ece3fc4246b41f790011059cf9f9a96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf1a449fc918f837d2202862dd252862 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5326f8d6a34c8fe0dfd0f715d64072e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97dbe753835d0d28c846b782a478ffe2
publicationDate	2002-04-30^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6379466-B1
titleOfInvention	Temperature controlled gas distribution plate
abstract	The temperature controlled gas distribution plate of the present invention includes a liquid cooling passage, with inlet and outlet ports, that is formed within the gas distribution plate. In the preferred embodiment, the plate is formed with an upper passage cover and a lower base having a liquid passage channel formed within the side walls thereof. The cover and base are welded together to form a sealed liquid passage within the plate through which the liquid coolant flows.
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