| abstract |
An enclosed solvent and aqueous decompression processing system includes a chamber for holding an object to be processed. At least one vacuum pump applies a negative gauge pressure to the chamber to remove air and other non-condensable gases. Means are provided for introducing a solvent to the evacuated chamber to treat the object contained within. Treatment may be in the form of coating, etching, deposition, cleaning, stripping, plating, adhesion, dissolving, filtering or any other process in which material is removed or deposited on a solid surface by transfer from or to a liquid phase. A first system removes pressure from the chamber to produce vapor bubbles for processing. A second system increases pressure by ceasing to apply vacuum or adding non-condensable gases. The system includes recovery of the solvent from the chamber and object. A method of treating an object in an enclosed solvent processing system, comprises the steps of: isolating a solvent supply system with respect to the chamber; evacuating the chamber to remove air and other non-condensable gases; isolating the chamber with respect to atmosphere; introducing a solvent into the evacuated chamber; processing the object by cyclically alternating vacuum and pressure in the chamber; recovering the solvent introduced into the chamber; sealing the chamber with respect to the solvent supply system; introducing air into the chamber for sweeping further solvent on the object and within the chamber; and removing the treated object. |