| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
1998-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-10-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2901bb52591246fa4e6c7024e72bc025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abc4e0207e7c878fb12a4f104f359766 |
| publicationDate |
2002-10-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6472130-B1 |
| titleOfInvention |
Solution of tetramethylammonium hydroxide in water and a process for preparing the solution |
| abstract |
A solution of tetramethylammonium hydroxide in water comprises a surfactant component and a hydrotropic component. A process for preparing a solution for developing an exposed photoresist comprises the steps: preparation of a solution of tetramethylammonium hydroxide in water; addition of a surfactant component; and addition of a hydrotropic component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003174383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6872014-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6912081-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6800416-B2 |
| priorityDate |
1997-12-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |