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publicationDate 2003-03-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6535680-B1
titleOfInvention Process for producing an article having a predetermined surface shape and optical waveguide element
abstract There is provided an article which can be produced at a low cost, is excellent in heat resistance, chemical resistance and dimensional accuracy, and has a predetermined surface shape. In particular there is provided an optical waveguide which has high heat resistance and chemical resistance, a large difference in refractive index, small absorption at a communication wavelength of a near infrared range, reliability and a low loss at an optical communication range. The process for producing the article involves disposing a sol-gel material containing specified silanes between a substrate and a mold in the form of a film so as to make the sol-gel material closely contact the substrate and the mold, and heating to form a gelled film having a surface shape which is the inversion of the surface shape of the mold on the surface of the substrate.
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