| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-085 |
| filingDate |
2001-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f3d05d7a0428f53337bf66e0c566791
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_242aa1336038814487b136ffa11db0d3 |
| publicationDate |
2003-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6610609-B2 |
| titleOfInvention |
Compatibilization treatment |
| abstract |
Disclosed are compositions and methods for improving compatibility of imaging layers with dielectric layers. Also disclosed are methods of reducing or eliminating poisoning of photoresists during electronic device manufacture. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005090605-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6987198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003216495-A1 |
| priorityDate |
2000-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |