| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2001-04-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f505cbc4aad6864a8cc16ac2b60a5d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef4b098ec0dec41359a3c3562b2962a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ed225a22fbdfd13ecd30f84f25011aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65c7d1a7c61751505400f61c73813da4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_138bda8912e8c73310c4dc6acef77135 |
| publicationDate |
2003-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6627387-B2 |
| titleOfInvention |
Method of photolithography |
| abstract |
A method of photolithography. An anti-reflective coating is formed on the conductive layer. An nitrogen plasma treatment is performed. A photo-resist layer is formed and patterned on the anti-reflective coating. The conductive layer is defined. The photo-resist layer is removed. The anti-reflective layer is removed by using phosphoric acid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009075177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6872663-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6849538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004058515-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004062867-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7887875-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009131-A1 |
| priorityDate |
1998-01-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |