patent/US-6630995-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6630995-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-4704
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
filingDate	2000-10-06^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2003-10-07^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7908a536a5e384e9c46f41bd1b6fc416
publicationDate	2003-10-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6630995-B1
titleOfInvention	Method and apparatus for embedded substrate and system status monitoring
abstract	The present invention generally provides an apparatus and a method for inspecting a substrate in a processing system. One embodiment provides a substrate inspection apparatus, comprising a vacuum chamber lid, the lid comprising a body defining at least three ports located to provide a field of view to a common area on a substrate transfer plane and light management system.
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priorityDate	1999-09-07^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

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