patent/US-6635115-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6635115-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
filingDate	2000-05-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2003-10-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ee1afc152e0665817c3f4c28d80799c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_603ac6e3d8bd3e55b34f75efbe3be253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85ca9a560cd95502b81f2fa60eb62be4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aeb4673f00068911bc50dfbf5a543e52
publicationDate	2003-10-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6635115-B1
titleOfInvention	Tandem process chamber
abstract	The present invention provides an apparatus for vacuum processing generally comprising an enclosure having a plurality of isolated chambers formed therein, a gas distribution assembly disposed in each processing chamber, a gas source connected to the plurality of isolated chambers, and a power supply connected to each gas distribution assembly.
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