http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6678043-B1

Outgoing Links

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filingDate 2000-10-31^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-01-13^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_274c92669191f5585144b321456fdb31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbb06aaa7544bad37db76f301af77c2c
publicationDate 2004-01-13^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6678043-B1
titleOfInvention Methods and apparatus for surface analysis
abstract There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.
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