| abstract |
A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response. |