| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3bf96311fde209e9fad008b4b8616252 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate |
2003-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-09-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3bc5623d5e3cffbf986ccb6fcbfc3ae |
| publicationDate |
2004-09-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6790582-B1 |
| titleOfInvention |
Photoresist compositions |
| abstract |
The present invention relates to a composition and a process for preparing a composition that comprises: a) a novolak resin partially esterified with from about 3 to about 7 weight percent of a naphthoquinonediazidosulfonyl group; b) one or more dilution resins; and c) at least one solvent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9983477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006222999-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I512785-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011236823-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011305990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013171563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569260-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012292286-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7820355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785103-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004197704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9606435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9650538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006040201-A1 |
| priorityDate |
2003-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |