| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47985b7c371b565f319708450999686 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-0036 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H51-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H59-00 |
| filingDate |
2003-10-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-07-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f74f985e564ed2ea6d6f72b2dcbad2dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3890dc23adf9d3e13a1f118343b34f41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6e00cd8aecda0c9e1631366a39e7dbd |
| publicationDate |
2006-07-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7075393-B2 |
| titleOfInvention |
Micromachined relay with inorganic insulation |
| abstract |
A micromechanical relay is made by surface micromachining techniques. It includes a metallic cantilever beam deflectable by an electrostatic field and a beam contact connected to the beam and electrically insulated from the beam by an insulating segment. During operation, the beam deflects, and the beam contact establishes an electrical contact between two drain electrodes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009134893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7728610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9505611-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006269186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7504841-B2 |
| priorityDate |
2002-10-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |