| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2002-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bea5b1a09f5a19975a3ff6e3bceab8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8d787a1a28d9c496ac5be4e7d1be62d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8805266b989f4efd32e0584087c074af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3591cb4617fbd1fcf0b08b5a82bb0029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b033a8a01a43c59089feb5b2dd43e6 |
| publicationDate |
2006-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7084621-B2 |
| titleOfInvention |
Enhancement of eddy current based measurement capabilities |
| abstract |
A method and an apparatus for enhancement of the for measuring resistance-based features of a substrate is provided. The apparatus includes a sensor configured to detect a signal produced by a eddy current generated electromagnetic field. The magnetic field enhancing source is positioned to the alternative side of the object under measurement relative to the sensor to enable the sensitivity enhancing action. The sensitivity enhancing source increases the intensity of the eddy current generated in the object under measurement, and as a result the sensitivity of the sensor. A system enabled to determine a thickness of a layer and a method for determining a resistance-based feature characteristic are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009051358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9685816-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010279438-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7777483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8337278-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008186022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007218806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7537511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009149115-A1 |
| priorityDate |
2002-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |