http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7101720-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| filingDate | 2004-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-09-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa9e06d3fd3d084867f579d850553b3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2 |
| publicationDate | 2006-09-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7101720-B2 |
| titleOfInvention | Mixed noble metal/noble metal oxide bottom electrode for enhanced PGO c-axis nucleation and growth |
| abstract | A method is provided for forming a single-phase c-axis PGO film overlying a Pt metal electrode. Although the method is summarized in the context of a Pt bottom electrode, it has a broader application to other noble metals. The method comprises: forming a bottom electrode mixture of Pt and Pt 3 O 4 ; forming a single-phase c-axis PGO thin film overlying the bottom electrode; and, forming a top electrode overlying the PGO thin film. Forming a bottom electrode mixture of a Pt and Pt 3 O 4 includes: forming a Pt first layer; and, forming a second layer, interposed between the first layer and the PGO thin film, of fully oxidized Pt 3 O 4 . In other aspects, forming a bottom electrode mixture of Pt and Pt 3 O 4 includes forming a polycrystalline mixture of Pt and Pt 3 O 4 . A c-axis PGO film capacitor is also provided. Again, a Pt bottom electrode is described, along with other noble metal bottom electrodes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006154417-A1 |
| priorityDate | 2004-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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