| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-04-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ebe8b8d3fdcf42788496d0b15ea1ec3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d90aabbb849649d5396814da30ca2d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1eaec517ec2a609c0ac6ea1fedd5c09 |
| publicationDate |
2006-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7129017-B2 |
| titleOfInvention |
Chemically amplified resist composition and method for forming patterned film using same |
| abstract |
A chemically amplified resist composition which comprises a base resin reacting in the presence of an acid, a photo acid generator generating an acid upon exposure, and a compound having the combination of an acetal moiety and a site which is eliminated by an acid in its molecule, or which comprises a base resin, which is a copolymer having the combination of an acetal moiety and a site eliminated by an acid in one repeating unit and reacts in the presence of an acid, and a photo acid generator generating an acid upon exposure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013157194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011236826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9057949-B2 |
| priorityDate |
2001-04-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |