| abstract |
A sensor element ( 5 ) detects a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies ( 10, 20 ) that move in relation to each other during operation and experience high tribological stress. In certain areas between the surfaces of the bodies ( 10, 20 ) that move in relation to each other, in a surface region of at least one of the bodies ( 10 ), a sensitive layer ( 13, 30 ), in particular a sensor segment ( 13 ), is provided, which is separated from the body ( 10 ) by an insulation layer ( 12 ). The insulation layer ( 12 ) has at least two component layers ( 31, 32 ), wherein a first component layer ( 31 ) is a layer ( 31 ) with at least a low electrical conductivity in comparison to the sensitive layer ( 13 ) and wherein a second component layer ( 32 ) is a layer with a higher tribological stress capacity in comparison to the first component layer ( 31 ) with the comparatively low electrical conductivity and/or the insulation layer ( 12 ) is a layer that is at least essentially comprised of carbon, or contains carbon, oxygen, and silicon. The sensor element ( 5 ) proposed is primarily suited for detecting measurement variables in the contact region between lubricated components under high tribological stress. |