| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_72c35acfaaeef5f514825a3398634293 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249967
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2266-0278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2266-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2264-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249976
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2003-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-05-22^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39d77cd861f895cdba9aad3c1ff26944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fbb825153809f4c5de7614ab6afc799 |
| publicationDate |
2007-05-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7220475-B2 |
| titleOfInvention |
Polishing sheet and polishing work method |
| abstract |
The present invention provides a polishing sheet that can secure a flatness of a material to be polished and can improve a polishing efficiency. A polishing pad 1 has a polyurethane sheet 2 made of polyurethane resin. The polyurethane sheet 2 has large cells 3 with a generally triangular sectional configuration rounded along a thickness direction thereof. Polyurethane resin exists in the polyurethane sheet 2 in a partition wall manner and fine foams 4 are formed in the polyurethane resin. Fine particles 5 added during manufacture of the polyurethane sheet 2 exist inside some of the fine foams 4 and the fine particles 5 are separable from the fine foams. By separating off fine particles positioned at a polishing face P by dummy polishing or the like, fine foams which evenly reserve a polishing liquid containing abrasive particles are formed at the polishing face P. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009061743-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011076928-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021323116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8162728-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104723228-A |
| priorityDate |
2003-06-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |