| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-62 |
| filingDate |
2004-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1014106bf0a54471b61ba2486599037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53234e57f436a50a61d78c680b8d5fa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b34931b8222c6548f454b104c8fb997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7283a5897e721589562b4d00cde33f84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd46a921374ef8e615f79f0399dad64b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acf59ae467ce4ed103aba1b85e8910f0 |
| publicationDate |
2007-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7232588-B2 |
| titleOfInvention |
Device and method for vaporizing temperature sensitive materials |
| abstract |
A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009242877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076009-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010117519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010117520-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8216697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010141122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7931975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009108735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009108734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009110956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8420229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007207261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8431242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006099345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8147989-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006138075-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7968215-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010207513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7947974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010219748-A1 |
| priorityDate |
2004-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |