http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7282413-B2

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filingDate 2005-12-28^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-10-16^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19e66730ae94f2dd30255c8d2417ebb2
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publicationDate 2007-10-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7282413-B2
titleOfInvention Semiconductor device including nonvolatile memory and method for fabricating the same
abstract A semiconductor device including a nonvolatile memory and the fabrication method of the same is described formed on a semiconductor substrate. According to the semiconductor device, a second gate electrode film is used for a gate electrode film of a logic circuit, and for a control gate electrode film of a nonvolatile memory. As the second gate electrode film is formed at a relatively later step in fabrication, subsequent thermal process may be avoided. The gate structure is suitable for miniaturization of the transistor in the logic circuit.
priorityDate 2003-06-30^^<http://www.w3.org/2001/XMLSchema#date>
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