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filingDate 2005-07-21^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-03-04^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7339255-B2
titleOfInvention Semiconductor device having bidirectionally inclined toward <1-100> and <11-20> relative to {0001} crystal planes
abstract A semiconductor substrate encompasses a GaN substrate and a single-crystal layer formed of III-V nitride compound semiconductor epitaxially grown on the GaN substrate. The GaN substrate has a surface orientation defined by an absolute value of an off-angle of the surface from {0001} plane towards <1−100> direction lying in a range of 0.12 degree to 0.35 degree and by an absolute value of an off-angle of the surface from {0001} plane towards <11−20> direction lying in a range of 0.00 degree to 0.06 degree.
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