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publicationNumber US-7390421-B2
titleOfInvention Method for forming inkjet nozzles having a coiled thermal actuator mechanism
abstract A nozzle of an ink jet printer is formed by initially providing a silicon wafer having a circuitry wafer layer including electrical circuitry necessary for the operation of the thermal actuators on demand. The actuator is formed by forming a first inert material layer defining an actuator path in the shape of a planar coil starting at the thermal actuator anchor. Then, a first conductive material layer is formed adjacent the actuator path and attached to the first inert material layer.
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