| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2002-03-29^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_257e433685bdefc11878a1f64a1d0c00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9eca44c83ecebe93af93a3eca3b888d4 |
| publicationDate |
2008-08-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7413914-B2 |
| titleOfInvention |
Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor device |
| abstract |
A process of manufacturing a semiconductor device utilizing a thermo-chemical reaction is started based on preset initial settings, a state function of an atmosphere associated with the thermo-chemical reaction is measured, a state of the atmosphere and a change thereof are analyzed based on measurement data obtained by the measurement, and then, analysis data obtained by the analysis is fed back to a manufacturing process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8639489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008155445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008155443-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10444749-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8612198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8775148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8473270-B2 |
| priorityDate |
2001-03-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |