| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate |
2006-07-25^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78c0659ae1964cf56080da1885214bec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a735421ddfde1fd07f095d63f6fab5d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71e3bf0158bbdfa86a49123dd5cdcaf0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45c644e70e9d02fc6874358dc4451a78 |
| publicationDate |
2008-08-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7417274-B2 |
| titleOfInvention |
Semiconductor device including direct contact between capacitor electrode and contact plug and method of manufacturing the same |
| abstract |
A semiconductor device comprises an insulation film that is provided on a semiconductor substrate, a first contact plug that is provided in the insulation film and includes a metal, a first adhesive film that is provided on the insulation film, has a higher oxygen affinity than the metal, and includes an oxide, a second adhesive film that is provided on the first contact plug and has a film thickness that is smaller than a film thickness of the first adhesive film, a first capacitor electrode that is provided on the contact plug and the first adhesive film, has a part in direct contact with the first contact plug, a capacitor insulation film that is provided on the first capacitor electrode, and a second capacitor electrode that is provided on the capacitor insulation film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008277706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7893472-B2 |
| priorityDate |
2005-09-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |