http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7507437-B2

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filingDate 2005-08-05^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2009-03-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0bc0527de9509b23ae05fbab7854e29
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publicationDate 2009-03-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7507437-B2
titleOfInvention Method of wet coating for applying anti-reflective film to substrate
abstract A method of wet coating for applying an anti-reflective film to a substrate comprises the following steps: (1) providing and cleaning a substrate; (2) preparing a coating solution comprised of a highly volatile solvent and a film-forming compound dissolved in the highly volatile solvent; (3) coating the substrate homogeneously with the above coating solution at normal temperature and confirming complete evaporation of the liquid on the substrate at normal temperature to finish a single layer coating without thermal treatment; and (4) repeating the above coating step as required to obtain a desired number of layers.
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priorityDate 2004-09-02^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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