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filingDate 2005-04-04^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2009-03-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_461d7721c0789e9f08cadacb5bc6e1eb
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publicationDate 2009-03-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7507850-B2
titleOfInvention Preparation of organosilane esters
abstract The present invention relates to a specific process for preparing organosilane esters of the formula (I) and a composition comprising more than 98% by weight of organosilane esters of the formula (I) and less than 2.0% by weight of at least one hydrocarbon and to the use of such a composition as precursor for producing a layer or film having a dielectric constant of 1<κ≦4.
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