| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7580c986f51e744d448b76d00ee1e279 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-7015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B13-14 |
| filingDate |
2007-08-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab6a4585b1a603299b84df17b1e2402a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f262b88e04b5f70b5528fdfc91cf68b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36df633b659675306e4d33581da7e9ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5582d36fcb82b80c42a0a736284a214e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8192fa7ce978f08adf36ee345a5227a |
| publicationDate |
2009-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7515363-B2 |
| titleOfInvention |
Replacement apparatus for an optical element |
| abstract |
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same. |
| priorityDate |
2003-12-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |