| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f8f91b8ca0e89187ef64cd5aa2939513 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1637
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N39-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
| filingDate |
2007-09-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-05-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_387387fcae250bd457fe089b1c650a15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f70ab7e90c3931f4f29ccd33f3feda57 |
| publicationDate |
2009-05-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7526846-B2 |
| titleOfInvention |
Forming piezoelectric actuators |
| abstract |
Microelectromechanical systems with structures having piezoelectric actuators are described. The structures each have a body that supports piezoelectric islands. The piezoelectric islands have a first surface and a second opposite surface. The piezoelectric islands can be formed, in part, by forming cuts into a thick layer of piezoelectric material, attaching the cut piezoelectric layer to a body having etched features and grinding the piezoelectric layer to a thickness that is less than the depths of the cuts. Conductive material can be formed on the piezoelectric layer to form electrodes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013200175-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8348396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8939556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009322187-A1 |
| priorityDate |
2004-10-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |