http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7659582-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1266 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78603 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2007-01-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-02-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb02c81634fcea72f48cd417aa5482a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7762ee5cad6eee624fda944505d58642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9788010d24e6aa2b23358e6480ad1f9c |
| publicationDate | 2010-02-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7659582-B2 |
| titleOfInvention | Active silicon device on a cleaved silicon-on-insulator substrate |
| abstract | A system and method for hydrogen (H) exfoliation are provided for attaching silicon-on-insulator (SOI) fabricated circuits to carrier substrates. The method comprises: providing a SOI substrate, including a silicon (Si) active layer and buried oxide (BOX) layer overlying a Si substrate; forming a circuit in the Si active layer; forming a blocking mask over selected circuit areas; implanting H in the Si substrate; annealing; removing the blocking mask; in response to the H implanting, forming a cleaving plane in the Si substrate; bonding the circuit the top oxide layer to the carrier substrate; and, cleaving the Si substrate. More specifically, the cleaving plane is formed along a horizontal peak concentration (Rp) H layer in the Si substrate and along the buried oxide layer interface. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496255-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030177-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010120224-A1 |
| priorityDate | 2004-09-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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