| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14ba71eccbb5f65a22b78f39b3c6ffc3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-185 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2006-05-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c86ff73b97b88e30ccd1f816ef688ff6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_576f38af2fef3dfa7b62aa841b02e79c |
| publicationDate |
2011-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7902070-B2 |
| titleOfInvention |
Method and system for producing optically transparent noble metal films |
| abstract |
A method and system for producing a noble metal film includes the step of sputtering a noble metal on a substrate thus obtaining a film. The method and system further includes the step of subjecting the film to a thermal treatment, thus obtaining the noble metal film. |
| priorityDate |
2005-04-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |